실리콘 웨이퍼 성장장치용 극저온용기
- 극저온 장비
Customer :
Duksung
● Purpose : for 8〃 Si-Wafer Growing System
● Technical Features : With 2 refrigerators and 20K, 80K shield
– Diameter : 1670 mm
– RT bore : 1270 mm
– Height : 1200 mm
– Cooling Capacity : 1.5 W @ 4.2K
– LHe boil off : 0 l/h
실리콘 웨이퍼 성장장치용 극저온용기
- 극저온 장비
Customer :
Duksung
● Purpose : for 8〃 Si-Wafer Growing System
● Technical Features : With 2 refrigerators and 20K, 80K shield
– Diameter : 1670 mm
– RT bore : 1270 mm
– Height : 1200 mm
– Cooling Capacity : 1.5 W @ 4.2K
– LHe boil off : 0 l/h